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Copolymers of camphorsulfonyloxymaleimide andt-BOC protected vinyllactams for applications as single-component resists
Sang -Tae Kim, Jin -Baek Kim, Min -Ho Jung, Kwang -Duk AhnVolume:
39
Language:
english
Pages:
8
DOI:
10.1007/s002890050168
Date:
October, 1997
File:
PDF, 712 KB
english, 1997