High-performance FET arrays enabled by improved uniformity...

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Applied Surface Science 2019 / 4

High-performance FET arrays enabled by improved uniformity of wafer-scale MoS2 synthesized via thermal vapor sulfurization

Wei, Junqing, Wang, Fang, Zhang, Baojun, Shan, Xin, Di, Xichao, Li, Yue, Feng, Yulin, Zhang, Kailiang
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.04.016
Date:
April, 2019
File:
PDF, 1.55 MB
english, 2019
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