Four-Probe Bridges for In-Line Determination of Thickness...

Applied Sciences 2018 / 11 Vol. 8; Iss. 12

Four-Probe Bridges for In-Line Determination of Thickness and Sidewall Etch Angle of Surface Micromachined Thin Films

Liu, Haiyun, Zhang, Zhen, Chen, Jiaqi
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Volume:
8
Journal:
Applied Sciences
DOI:
10.3390/app8122424
Date:
November, 2018
File:
PDF, 5.86 MB
2018
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