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Four-Probe Bridges for In-Line Determination of Thickness and Sidewall Etch Angle of Surface Micromachined Thin Films
Liu, Haiyun, Zhang, Zhen, Chen, JiaqiVolume:
8
Journal:
Applied Sciences
DOI:
10.3390/app8122424
Date:
November, 2018
File:
PDF, 5.86 MB
2018