Deposition of hydrophilic amorphous carbon film with ether as a source molecule and analysis of its deposition reaction
Shinohara, Masanori, Tominaga, Taisuke, Shimomura, Hayato, Ihara, Takeshi, Yagyu, Yoshihito, Ohshima, Tamiko, Kawasaki, HiroharuVolume:
102
Journal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.12157
Date:
April, 2019
File:
PDF, 886 KB
2019