A Study on the NF3 Plasma Etching Reaction with Cobalt...

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Plasma Chemistry and Plasma Processing 2019 / 3

A Study on the NF3 Plasma Etching Reaction with Cobalt Oxide Grown on Inconel Base Metal Surface

Lee, Jaeyong, Kim, Kyungmin, Kim, Yong-Soo
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Language:
english
Journal:
Plasma Chemistry and Plasma Processing
DOI:
10.1007/s11090-019-09979-4
Date:
March, 2019
File:
PDF, 1.95 MB
english, 2019
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