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Fore-vacuum plasma-assisted deposition of dielectric coatings and process characterization
Yushkov, Yu G, Burachevsky, Yu A, Tyunkov, A V, Zolotukhin, D BVolume:
1145
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1145/1/012012
Date:
January, 2019
File:
PDF, 907 KB
2019