Infrared detector based on crystal ion sliced LiNbO3...

Microelectronic Engineering 2019 / 05 Vol. 213

Infrared detector based on crystal ion sliced LiNbO3 single-crystal film with BCB bonding and thermal insulating layer

Luo, Wenbo, Luo, Jiarui, Shuai, Yao, Zhang, Kaisheng, Wang, Tao, Wu, Chuangui, Zhang, Wanli
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Volume:
213
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.04.004
Date:
May, 2019
File:
PDF, 1.56 MB
english, 2019
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