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Sensors and Actuators A: Physical 2019 / 4

The investigation of integrated SAW strain sensor based on AlN/TC4 structure

Shu, Lin, Wang, Xuemin, Li, Ling, Yan, Dawei, Peng, Liping, Fan, Long, Wu, Weidong
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Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2019.04.012
Date:
April, 2019
File:
PDF, 594 KB
english, 2019
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