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A method for shortening effective channel length in oxide TFT by partial formation of conductive region
Nakata, Mitsuru, Ochi, Mototaka, Tsuji, Hiroshi, Takei, Tatsuya, Miyakawa, Masashi, Yamamoto, Toshihiro, Goto, Hiroshi, Kugimiya, Toshihiro, Fujisaki, YoshihideVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab12f1
Date:
September, 2019
File:
PDF, 1.40 MB
english, 2019