Multiphysics simulation of the aspherical deformation of piezo-glass membrane lenses including hysteresis, fabrication and nonlinear effects
Lemke, Florian, Frey, Yasmina, Bruno, Binal P, Philipp, Katrin, Koukourakis, Nektarios, Czarske, Jürgen, Wallrabe, Ulrike, Wapler, Matthias CVolume:
28
Language:
english
Journal:
Smart Materials and Structures
DOI:
10.1088/1361-665X/ab0eb3
Date:
May, 2019
File:
PDF, 2.05 MB
english, 2019