Characterization of the deposition behavior and changes in...

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Plasma Processes and Polymers 2019 / 04

Characterization of the deposition behavior and changes in bonding structures of hexamethyldisiloxane and decamethylcyclopentasiloxane atmospheric plasma‐deposited films*

Gilliam, Mary A., Farhat, Susan A., Garner, Graham E., Stubbs, Barrack P., Peterson, Benjamin B.
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Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201900024
Date:
April, 2019
File:
PDF, 1.56 MB
2019
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