Use of beam-shaping optics for wafer-scaled nanopatterning in laser interference lithography
Weber, Dominik, Heimburger, Robert, Hildebrand, Dirk, Junghans, Toni, Schondelmaier, Gianina, Walther, Christian, Schondelmaier, DanielVolume:
125
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-019-2538-4
Date:
May, 2019
File:
PDF, 2.41 MB
english, 2019