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Precision Engineering 2019 / 4

A tip-based metrology framework for real-time process feedback of roll-to-roll fabricated nanopatterned structures

Connolly, Liam G., Yao, Tsung-Fu, Chang, Andrew, Cullinan, Michael
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Journal:
Precision Engineering
DOI:
10.1016/j.precisioneng.2019.04.001
Date:
April, 2019
File:
PDF, 34.15 MB
2019
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