Diagnostics of argon cluster ion beam for materials treatment
Korobeishchikov, N G, Nikolaev, I V, Roenko, M AVolume:
1115
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1115/3/032016
Date:
November, 2018
File:
PDF, 1.36 MB
2018