Chemical bonding structure in porous SiOC films (k
Miyajima, Hideshi, Masuda, Hideaki, Watanabe, Kei, Ishikawa, Kenji, Sekine, Makoto, Hori, MasaruVolume:
3
Language:
english
Journal:
Micro and Nano Engineering
DOI:
10.1016/j.mne.2019.02.005
Date:
May, 2019
File:
PDF, 1.50 MB
english, 2019