Fabry Perot Interferometer Based Absolute Pressure Sensor with Stainless Steel Diaphragm
Ghildiyal, Shrinkhla, Ranjan, Prabhat, Mishra, Shivam, Balasubramaniam, R., John, JosephYear:
2019
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2019.2909097
File:
PDF, 1.93 MB
english, 2019