Impact of Sputtering Power on Amorphous In–Al–Zn–O Films...

IEEE Transactions on Electron Devices 2019 / 5 Vol. 66; Iss. 5

Impact of Sputtering Power on Amorphous In–Al–Zn–O Films and Thin Film Transistors Prepared by RF Magnetron Sputtering

Xu, Weidong, Xu, Meng, Jiang, Jianfeng, Xu, Sanjin, Feng, Xianjin
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Volume:
66
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2019.2906892
Date:
May, 2019
File:
PDF, 1.71 MB
english, 2019
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