![](/img/cover-not-exists.png)
Impact of Sputtering Power on Amorphous In–Al–Zn–O Films and Thin Film Transistors Prepared by RF Magnetron Sputtering
Xu, Weidong, Xu, Meng, Jiang, Jianfeng, Xu, Sanjin, Feng, XianjinVolume:
66
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2019.2906892
Date:
May, 2019
File:
PDF, 1.71 MB
english, 2019