Study of Ge-rich GeSbTe etching process with different halogen plasmas
Canvel, Yann, Lagrasta, Sébastien, Boixaderas, Christelle, Barnola, Sébastien, Mazel, Yann, Martinez, EugénieVolume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5089037
Date:
May, 2019
File:
PDF, 1.67 MB
english, 2019