Influence of Low-Temperature Annealing on the Electrical...

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Influence of Low-Temperature Annealing on the Electrical Conductivity of SiOx Films

Pylypova, O. V., Evtukh, A. A., Skryshevsky, V. A., Bratus, O. L.
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Journal:
Silicon
DOI:
10.1007/s12633-019-00149-x
Date:
April, 2019
File:
PDF, 1.09 MB
2019
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