![](/img/cover-not-exists.png)
Influence of Low-Temperature Annealing on the Electrical Conductivity of SiOx Films
Pylypova, O. V., Evtukh, A. A., Skryshevsky, V. A., Bratus, O. L.Journal:
Silicon
DOI:
10.1007/s12633-019-00149-x
Date:
April, 2019
File:
PDF, 1.09 MB
2019