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Electrochemical Deposition of Metal Nitride Films in a Molten Chloride System
Goto, Takuya, Niki, Aiko, Tsujimura, Hiroyuki, Ito, YasuhikoVolume:
2004-24
Language:
english
Journal:
ECS Proceedings Volumes
DOI:
10.1149/200424.0964PV
Date:
January, 2004
File:
PDF, 2.27 MB
english, 2004