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MEMS-based microheaters integrated gas sensors
Singh, Avneet, Sharma, Anjali, Dhull, Nidhi, Arora, Anil, Tomar, Monika, Gupta, VinayVolume:
193
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584587.2018.1514877
Date:
October, 2018
File:
PDF, 2.60 MB
2018