Unintentional As incorporation into AlSb and interfacial...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 05 Vol. 37; Iss. 3

Unintentional As incorporation into AlSb and interfacial layers within InAs/AlSb superlattices

Hu, Yunong, Tam, Man Chun, Wasilewski, Zbigniew R.
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Volume:
37
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5088974
Date:
May, 2019
File:
PDF, 1.11 MB
2019
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