Fabrication of submicron gratings in fused silica by...

Fabrication of submicron gratings in fused silica by F2-laser ablation

J. Ihlemann, S. Müller, S. Puschmann, D. Schäfer, M. Wei, J. Li, P.R. Herman
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Volume:
76
Language:
english
Pages:
3
DOI:
10.1007/s00339-002-1467-8
Date:
March, 2003
File:
PDF, 135 KB
english, 2003
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