Synthesis of nano-sized SiC precipitates in Si by...

Applied Physics A: Materials Science & Processing 2003 / 03 Vol. 76; Iss. 5

Synthesis of nano-sized SiC precipitates in Si by simultaneous dual-beam implantation of C+and Si+ions

R. Kögler, F. Eichhorn, J.R. Kaschny, A. Mücklich, H. Reuther, W. Skorupa, C. Serre, A. Perez-Rodriguez
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Volume:
76
Language:
english
Pages:
9
DOI:
10.1007/s00339-002-1495-4
Date:
March, 2003
File:
PDF, 480 KB
english, 2003
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