Extremely high-aspect-ratio patterns in macroporous...

Applied Physics A: Materials Science & Processing 2003 / 05 Vol. 76; Iss. 7

Extremely high-aspect-ratio patterns in macroporous substrate by focused-ion-beam etching: the realization of three-dimensional lattices

K. Wang, A. Chelnokov, S. Rowson, J.-M. Lourtioz
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Volume:
76
Language:
english
Pages:
4
DOI:
10.1007/s00339-002-1942-2
Date:
May, 2003
File:
PDF, 336 KB
english, 2003
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