The early oxynitridation stages of hydrogen-terminated...

Applied Physics A: Materials Science & Processing 2003 / 08 Vol. 77; Iss. 3-4

The early oxynitridation stages of hydrogen-terminated (100) silicon after exposure to N2:N2O. III. Initial conditions

G.F. Cerofolini, C. Galati, S. Lorenti, L. Renna, O. Viscuso, C. Bongiorno, V. Raineri, C. Spinella, G.G. Condorelli, I.L. Fragalà, A. Terrasi
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Volume:
77
Language:
english
Pages:
7
DOI:
10.1007/s00339-002-1997-0
Date:
August, 2003
File:
PDF, 753 KB
english, 2003
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