Three-dimensional structuring of sapphire by sequential...

Applied Physics A: Materials Science & Processing 2003 / 05 Vol. 76; Iss. 7

Three-dimensional structuring of sapphire by sequential He+ion-beam implantation and wet chemical etching

A. Crunteanu, G. Jänchen, P. Hoffmann, M. Pollnau, C. Buchal, A. Petraru, R.W. Eason, D.P. Shepherd
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Volume:
76
Language:
english
Pages:
4
DOI:
10.1007/s00339-002-2027-y
Date:
May, 2003
File:
PDF, 552 KB
english, 2003
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