Investigations of silicon nitride and boron carbide...

Applied Physics A: Materials Science & Processing 2004 / 03 Vol. 78; Iss. 5

Investigations of silicon nitride and boron carbide monolayers and Si3N4/B4C multilayers

M. Lattemann, S. Ulrich, H. Leiste, E. Nold, H. Holleck
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Volume:
78
Language:
english
Pages:
4
DOI:
10.1007/s00339-003-2276-4
Date:
March, 2004
File:
PDF, 271 KB
english, 2004
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