Improvement of the PLD process assisted by RF plasma for...

Applied Physics A: Materials Science & Processing 2005 / 02 Vol. 80; Iss. 4

Improvement of the PLD process assisted by RF plasma for AlN growth

A. Basillais, R. Benzerga, H. Sanchez, E. Le Menn, C. Boulmer-Leborgne, J. Perrière
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Volume:
80
Language:
english
Pages:
9
DOI:
10.1007/s00339-003-2325-z
Date:
February, 2005
File:
PDF, 1.05 MB
english, 2005
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