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Improvement of the PLD process assisted by RF plasma for AlN growth
A. Basillais, R. Benzerga, H. Sanchez, E. Le Menn, C. Boulmer-Leborgne, J. PerrièreVolume:
80
Language:
english
Pages:
9
DOI:
10.1007/s00339-003-2325-z
Date:
February, 2005
File:
PDF, 1.05 MB
english, 2005