![](/img/cover-not-exists.png)
Exploration of the ultimate patterning potential achievable with high resolution focused ion beams
J. Gierak, D. Mailly, P. Hawkes, R. Jede, L. Bruchhaus, L. Bardotti, B. Prével, P. Mélinon, A. Perez, R. Hyndman, J.-P. Jamet, J. Ferré, A. Mougin, C. Chappert, V. Mathet, P. Warin, J. ChapmanVolume:
80
Language:
english
Pages:
8
DOI:
10.1007/s00339-004-2551-z
Date:
January, 2005
File:
PDF, 1.12 MB
english, 2005