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A novel PLD configuration for deposition of films of improved quality: a case study of carbon nitride
T. Szörényi, B. Hopp, Z. GeretovszkyVolume:
79
Language:
english
Pages:
3
DOI:
10.1007/s00339-004-2719-6
Date:
September, 2004
File:
PDF, 218 KB
english, 2004