Measurement of boron and phosphorus concentration in...

Applied Physics A: Materials Science & Processing 2005 / 11 Vol. 81; Iss. 6

Measurement of boron and phosphorus concentration in silicon by low-temperature FTIR spectroscopy

M. Porrini, M.G. Pretto, R. Scala, A.V. Batunina, H.C. Alt, R. Wolf
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Volume:
81
Language:
english
Pages:
4
DOI:
10.1007/s00339-004-3032-0
Date:
November, 2005
File:
PDF, 477 KB
english, 2005
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