Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture
K. Sugioka, Y. Cheng, K. MidorikawaVolume:
81
Language:
english
Pages:
10
DOI:
10.1007/s00339-005-3225-1
Date:
June, 2005
File:
PDF, 808 KB
english, 2005