Nanostructure fabrication by glancing angle ion beam assisted deposition of silicon
E. Schubert, T. Höche, F. Frost, B. RauschenbachVolume:
81
Language:
english
Pages:
6
DOI:
10.1007/s00339-005-3270-9
Date:
August, 2005
File:
PDF, 572 KB
english, 2005