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Effects of implantation defects on the carrier concentration of 6H-SiC
A. Ruggiero, S. Libertino, F. Roccaforte, F. La Via, L. CalcagnoVolume:
82
Language:
english
Pages:
5
DOI:
10.1007/s00339-005-3379-x
Date:
February, 2006
File:
PDF, 406 KB
english, 2006