Real-time monitoring and control of nitride growth rates by...

Journal of Crystal Growth 2019 / 07 Vol. 517

Real-time monitoring and control of nitride growth rates by Metal Modulated Epitaxy

Averett, Kent L., Hatch, John B., Eyink, Kurt G., Bowers, Cynthia T., Mahalingam, Krishnamurthy
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Volume:
517
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.04.008
Date:
July, 2019
File:
PDF, 979 KB
english, 2019
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