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Replica molding of picosecond laser fabricated Si microstructures
C. Reinhardt, S. Passinger, V. Zorba, B.N. Chichkov, C. FotakisVolume:
87
Language:
english
Pages:
5
DOI:
10.1007/s00339-007-3881-4
Date:
June, 2007
File:
PDF, 488 KB
english, 2007