Sacrificial etching of AlxGa1-xAs for III–V MEMS surface...

Applied Physics A: Materials Science & Processing 2007 / 09 Vol. 88; Iss. 4

Sacrificial etching of AlxGa1-xAs for III–V MEMS surface micromachining

P. Kumar, S. Kanakaraju, D.L. DeVoe
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Volume:
88
Language:
english
Pages:
4
DOI:
10.1007/s00339-007-4032-7
Date:
September, 2007
File:
PDF, 246 KB
english, 2007
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