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Characterization and optimization of magnetron sputtered Sc/Si multilayers for extreme ultraviolet optics
J. Gautier, F. Delmotte, F. Bridou, M.F. Ravet, F. Varniere, M. Roulliay, A. Jerome, I. VickridgeVolume:
88
Language:
english
Pages:
7
DOI:
10.1007/s00339-007-4041-6
Date:
September, 2007
File:
PDF, 483 KB
english, 2007