Deposition of polyimide precursor by resonant infrared laser ablation
N.L. Dygert, A.P. Gies, K.E. Schriver, R.F. Haglund Jr.Volume:
89
Language:
english
Pages:
7
DOI:
10.1007/s00339-007-4155-x
Date:
November, 2007
File:
PDF, 791 KB
english, 2007