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Two-step sputtered ZnO piezoelectric films for film bulk acoustic resonators
Re-Ching Lin, Ying-Chung Chen, Kuo-Sheng KaoVolume:
89
Language:
english
Pages:
5
DOI:
10.1007/s00339-007-4157-8
Date:
November, 2007
File:
PDF, 439 KB
english, 2007