Quartz crystal microbalance study of precursor diffusion...

Quartz crystal microbalance study of precursor diffusion during molecular layer deposition using cyclic azasilane, maleic anhydride, and water

Ju, Ling, Vemuri, Vamseedhara, Strandwitz, Nicholas C.
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5093509
Date:
May, 2019
File:
PDF, 1.13 MB
english, 2019
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