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Quartz crystal microbalance study of precursor diffusion during molecular layer deposition using cyclic azasilane, maleic anhydride, and water
Ju, Ling, Vemuri, Vamseedhara, Strandwitz, Nicholas C.Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5093509
Date:
May, 2019
File:
PDF, 1.13 MB
english, 2019