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Generation of surface features in films deposited by
Aaron Sellinger, Elodie Leveugle, James M. Fitz-Gerald, Leonid V. ZhigileiVolume:
92
Language:
english
Pages:
9
DOI:
10.1007/s00339-008-4582-3
Date:
September, 2008
File:
PDF, 1.73 MB
english, 2008