Effects of an organotin compound on radiation-induced...

Japanese Journal of Applied Physics 2019 / 01 Vol. 58; Iss. 1

Effects of an organotin compound on radiation-induced reactions of extreme-ultraviolet resists utilizing polarity change and radical crosslinking

Enomoto, Satoshi, Yoshino, Takumi, Machida, Kohei, Kozawa, Takahiro
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Volume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/aae986
Date:
January, 2019
File:
PDF, 775 KB
english, 2019
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