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Laser-induced local dehydroxylation on surface-oxidized silicon substrates: mechanistic aspects and prospects in nanofabrication
Nils Hartmann, Benjamin Klingebiel, Thorsten Balgar, Steffen Franzka, Eckart HasselbrinkVolume:
94
Language:
english
Pages:
9
DOI:
10.1007/s00339-008-4948-6
Date:
January, 2009
File:
PDF, 564 KB
english, 2009