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Influence of oxygen depletion layer on the properties of tin oxide gas-sensing films fabricated by atomic layer deposition
Gomathi Natarajan, David C. CameronVolume:
95
Language:
english
Pages:
7
DOI:
10.1007/s00339-009-5154-x
Date:
June, 2009
File:
PDF, 605 KB
english, 2009