Demolding temperature in thermal nanoimprint lithography
Sunggook Park, Zhichao Song, Lance Brumfield, Alborz Amirsadeghi, Jaejong LeeVolume:
97
Language:
english
Pages:
8
DOI:
10.1007/s00339-009-5224-0
Date:
November, 2009
File:
PDF, 528 KB
english, 2009