Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing
Desbiolles, B. X. E., Bertsch, A., Renaud, P.Volume:
5
Language:
english
Journal:
Microsystems & Nanoengineering
DOI:
10.1038/s41378-019-0052-7
Date:
December, 2019
File:
PDF, 2.98 MB
english, 2019