Development of Al-based multilayer optics for EUV

Applied Physics A: Materials Science & Processing 2010 / 01 Vol. 98; Iss. 1

Development of Al-based multilayer optics for EUV

E. Meltchakov, C. Hecquet, M. Roulliay, S. De Rossi, Y. Menesguen, A. Jérome, F. Bridou, F. Varniere, M.-F. Ravet-Krill, F. Delmotte
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Volume:
98
Language:
english
Pages:
7
DOI:
10.1007/s00339-009-5445-2
Date:
January, 2010
File:
PDF, 410 KB
english, 2010
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