Applications of excimer laser in nanofabrication

Applied Physics A: Materials Science & Processing 2010 / 01 Vol. 98; Iss. 1

Applications of excimer laser in nanofabrication

Qiangfei Xia, Stephen Y. Chou
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Volume:
98
Language:
english
Pages:
51
DOI:
10.1007/s00339-009-5455-0
Date:
January, 2010
File:
PDF, 6.17 MB
english, 2010
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